File:EUV Stochastic Hot Spots.png

EUV_Stochastic_Hot_Spots.png (309 × 289 pixels, file size: 42 KB, MIME type: image/png)

Summary

Description
English: Hot spots for stochastic defects are indicated where the small blue specks tend to collect. These indicate areas where there are stochastic absorbed dose variations close to the threshold level to print.[1]
Date
Source Own work
Author Guiding light

Licensing

I, the copyright holder of this work, hereby publish it under the following license:
w:en:Creative Commons
attribution share alike
This file is licensed under the Creative Commons Attribution-Share Alike 4.0 International license.
You are free:
  • to share – to copy, distribute and transmit the work
  • to remix – to adapt the work
Under the following conditions:
  • attribution – You must give appropriate credit, provide a link to the license, and indicate if changes were made. You may do so in any reasonable manner, but not in any way that suggests the licensor endorses you or your use.
  • share alike – If you remix, transform, or build upon the material, you must distribute your contributions under the same or compatible license as the original.

Reference

  1. Hot Spots for Stochastic Defects in EUV Lithography

Captions

Add a one-line explanation of what this file represents

Items portrayed in this file

depicts

9 April 2022

image/png

File history

Click on a date/time to view the file as it appeared at that time.

Date/TimeThumbnailDimensionsUserComment
current08:50, 9 April 2022Thumbnail for version as of 08:50, 9 April 2022309 × 289 (42 KB)Guiding lightUploaded own work with UploadWizard

The following page uses this file:

Metadata