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EUV_H-V_Best_Focus.png (651 × 515 pixels, file size: 45 KB, MIME type: image/png)
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Summary
| Description |
English: Best focus position for horizontal (H) and vertical (V) spaces as a function of pitch and NA (space width = 20 nm for NA=0.33, 12 nm for NA=0.55). A small annular illumination source is used. Ref.: J. van Schoot et al., 2016 EUVL Workshop, slide 19. |
| Date | |
| Source | https://www.euvlitho.com/2016/P61.pdf |
| Author | J. van Schoot et al. |
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Licensing
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This image of simple geometry is ineligible for copyright and therefore in the public domain, because it consists entirely of information that is common property and contains no original authorship. |  |
Original upload log
The original description page was here. All following user names refer to en.wikipedia.
| Date/Time | Dimensions | User | Comment |
|---|---|---|---|
| 2018-07-03 21:04:03 | 651 × 515 | Guiding light | Uploading a public-domain item using [[Wikipedia:File_Upload_Wizard|File Upload Wizard]] |
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File history
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| Date/Time | Thumbnail | Dimensions | User | Comment | |
|---|---|---|---|---|---|
| current | 16:28, 20 August 2019 | | 651 × 515 (45 KB) | Dave louis john | Transferred from en.wikipedia (MTC!) (1.1.0) |
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